Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement-Reference-Cited by-同舟云学术

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Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement

Published:2021-04-29 Issue:13 Volume:60 Page:3971
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Peng Lihua,Tang Dawei^ORCID,Wang Jian,Chen Rong,Gao Feng^ORCID,Zhou Liping

Funder

National Natural Science Foundation of China

State Key Lab of Digital Manufacturing Equipment and Technology

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference30 articles.

1. Optical Characterization of Thin Solid Films

2. Spectroscopic ellipsometry — Past, present, and future

3. Microellipsometer with radial symmetry

4. Angle-resolved annular data acquisition method for microellipsometry

5. Single-shot multispectral angle-resolved ellipsometry

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3. Incoherent partial superposition modeling for single-shot angle-resolved ellipsometry measurement of thin films on transparent substrates;Optics Express;2024-04-15

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