Self-compensation method for dual-beam roll angle measurement of linear stages
Author:
Funder
National Key Research and Development Program of China
Department of Science and Technology of Liaoning Province
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference25 articles.
1. Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage
2. Low cost, compact 4-DOF measurement system with active compensation of beam angular drift error
3. A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers
4. Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools
5. A three-axis autocollimator for detection of angular error motions of a precision stage
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