Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO_2 thin films with different substrate temperatures-Reference-Cited by-同舟云学术

Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO_2 thin films with different substrate temperatures

Published:2006-05-01 Issue:13 Volume:45 Page:3091
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Lee Cheng-Chung,Chen Hsi-Chao,Jaing Cheng-Chung

Publisher

The Optical Society

Reference13 articles.

1. Characterization of optical thin films

2. Repeatability of the composition of titanium oxide films produced by evaporation of Ti_2O_3

3. Refractive indices of TiO_2 films produced by reactive evaporation of various titanium–oxygen phases

4. Mechanical, optical and structural properties of TiO 2 and MgF 2 thin films deposited by plasma ion assisted deposition

5. Titanium oxide films on Si(100) deposited by e-beam evaporation

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