Effects of Substrate Temperature and Ion Source Energy on Stress of Thin Film
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Published:2018
Issue:9
Volume:55
Page:093101
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Hao Shuai 郝帅,Cui Bifeng 崔碧峰,Fang Tianxiao 房天啸,Wang Yang 王阳
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics