Water in contact with the backside of a silicon substrate enables drilling of high-quality holes through the substrate using ultrashort laser pulses
Author:
Funder
Stiftelsen för Strategisk Forskning
Knut och Alice Wallenbergs Stiftelse
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference48 articles.
1. Deep micro hole drilling in a silicon substrate using multi-bursts of nanosecond UV laser pulses
2. High repetition rate femtosecond laser forming sub-10 µm diameter interconnection vias
3. Very large spot size effect in nanosecond laser drilling efficiency of silicon
4. Femtosecond laser drilling of crystalline and multicrystalline silicon for advanced solar cell fabrication
5. Evolution of hole shape and size during short and ultrashort pulse laser deep drilling
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