Deep micro hole drilling in a silicon substrate using multi-bursts of nanosecond UV laser pulses
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Microdrilling and micromachining with diode-pumped solid-state lasers
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4. A study of thermal and mechanical effects on materials induced by pulsed laser drilling
5. High rate deep channel ablative formation by picosecond-nanosecond combined laser pulses
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