Axial nano-displacement measurement with high resolution and wide range based on asymmetrical illumination
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. The relative motion of the Earth and of the luminiferous ether
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Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage;Optics and Lasers in Engineering;2017-05
2. Axial nanodisplacement measurement based on the double-helix point spread function generated using radially polarized beams with vortex phase modulation;Japanese Journal of Applied Physics;2015-07-06
3. An axial displacement measurement relying on the double-helix light beam;Optics & Laser Technology;2014-07
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