Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage-Reference-Cited by-同舟云学术

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Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage

Published:2017-05 Issue: Volume:92 Page:94-104
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Chen Yu-Ta,Lin Wei-Chen,Liu Chien-Sheng

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Precise autofocusing microscope with rapid response;Liu;Opt Lasers Eng,2015

2. Laser beam micromachining (LBMM) – a review;Mishra;Opt Lasers Eng,2015

3. A laser microwelding method for assembly of polymer based microfluidic devices;Jiang;Opt Lasers Eng,2015

4. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage;Liu;Rev Sci Instrum,2005

5. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide;Feng;Opt Express,2013

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