Photoresist characterization and linearization procedure for the gray-scale fabrication of diffractive optical elements
Author:
Publisher
The Optical Society
Reference9 articles.
1. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
2. Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication
3. Understanding diffractive optic design in the scalar domain
4. Vector-based synthesis of finite aperiodic subwavelength diffractive optical elements
5. Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass
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