Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication
Author:
Publisher
The Optical Society
Reference11 articles.
1. Fresnel phase plate lenses for through-wafer optical interconnections
2. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
3. Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step
4. Fabrication of kinoform structures for optical computing
5. Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass
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