Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer
Author:
Funder
Defense Advanced Research Projects Agency (DARPA)
Publisher
The Optical Society
Reference17 articles.
1. Gradient-index optics: a review
2. High-speed optical coherence domain reflectometry
3. Absolute optical ranging using low coherence interferometry
4. Optical coherence-domain reflectometry: a new optical evaluation technique
5. Simultaneous thickness and group index measurement using optical low-coherence reflectometry
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