A dual-scanning white-light interferometer for exact thickness measurement of a large-thickness glass plate
Author:
Funder
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/ab4642/pdf
Reference11 articles.
1. Wide band interferometry for thickness measurement
2. Surface and thickness measurement of a transparent film using wavelength scanning interferometry
3. A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry
4. Vibration-insensitive measurements of the thickness profile of large glass panels
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