White-light ellipsometer with geometric phase shifter
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference29 articles.
1. Spectroscopic Ellipsometry
2. Recent developments in spectroscopic ellipsometry for materials and process control;Hilfiker,2003
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5. Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV
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