A phase-stepped spectroscopic ellipsometer
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Spectroscopic ellipsometry;Fujiwara,2007
2. Broadband spectral operation of a rotating-compensator ellipsometer;Opsal;Thin Solid Films,1998
3. High precision scanning ellipsometer;Aspnes;Appl Opt,1975
4. Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer;Chen;Appl Opt,1994
5. Development and construction of rotating polarizer analyzer ellipsometer;El-Agez;Opt Lasers Eng,2011
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