Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy

Published:2008-09-15 Issue:20 Volume:16 Page:15343
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Lin Jingquan,Weber Nils,Escher Matthias,Maul Jochen,Han Hak-Seung,Merkel Michael,Wurm Stefan,Schönhense Gerd,Kleineberg Ulf

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference12 articles.

1. Actinic inspection of extreme ultraviolet programed multilayer defects and cross-comparison measurements

2. Understanding and reduction of defects on finished EUV masks

3. Actinic detection and signal characterization of multilayer defects on EUV mask blanks

4. Actinic mask metrology for extreme ultraviolet lithography

5. Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. EUV multilayer defect characterization via cycle-consistent learning;Optics Express;2020-06-05

2. Imaging Atomically Thin Semiconductors Beneath Dielectrics via Deep Ultraviolet Photoemission Electron Microscopy;Physical Review Applied;2019-12-31

3. Monitoring the surface quality of silver plasmon waveguides with nonlinear photoemission electron microscopy and in-situ ion sputtering;Ultramicroscopy;2017-12

4. Applications in Other Fields;Surface Microscopy with Low Energy Electrons;2014

5. Wavelength-specific reflections: A decade of extreme ultraviolet actinic mask inspection research;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3