Correlation between pattern density and linewidth variation in silicon photonics waveguides
Author:
Funder
Fonds Wetenschappelijk Onderzoek
Agentschap Innoveren en Ondernemen
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference9 articles.
1. Silicon Photonics Circuit Design: Methods, Tools and Challenges
2. Performance prediction for silicon photonics integrated circuits with layout-dependent correlated manufacturing variability
3. Accurate extraction of fabricated geometry using optical measurement
4. Compact silicon photonics circuit to extract multiple parameters for process control monitoring
5. Pattern Based Prediction for Plasma Etch
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