Performance prediction for silicon photonics integrated circuits with layout-dependent correlated manufacturing variability-Reference-Cited by-同舟云学术

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Performance prediction for silicon photonics integrated circuits with layout-dependent correlated manufacturing variability

Published:2017-04-19 Issue:9 Volume:25 Page:9712
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Lu Zeqin,Jhoja Jaspreet,Klein Jackson,Wang Xu,Liu Amy,Flueckiger Jonas,Pond James,Chrostowski Lukas

Funder

CMC Microsystems (CMC)

Natural Sciences and Engineering Research Council of Canada (NSERC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference20 articles.

1. Design Challenges in Silicon Photonics

2. Schematic driven silicon photonics design

3. Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology

4. Silicon photonics manufacturing

5. Long Integrated Bragg Gratings for SoI Wafer Metrology

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