Comparative analysis of fabrication techniques for sensing windows on silicon nitride waveguide platforms-Reference-Cited by-同舟云学术

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Comparative analysis of fabrication techniques for sensing windows on silicon nitride waveguide platforms

Published:2024-06-18 Issue: Volume:12575 Page:48
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Container-title:Integrated Photonics Platforms III
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Author:

Hinum-Wagner Jakob W.,Hörmann Samuel M.,Feigl Gandolf,Schmidt Christoph,Morecroft Deborah,Kraft Jochen,Bergmann Alexander

Publisher

SPIE

Reference12 articles.

1. Scaling programmable silicon photonics circuits

2. Design optimization of silicon nitride-based microring resonator systems in a CMOS mass production environment;Hinum-Wagner,2023

3. Silicon photonic olfactory sensor based on an array of 64 biofunctionalized Mach-Zehnder interferometers

4. Silicon Nitride Photonic Particle Detector—Experiments and Model Assessment

5. Correlation between pattern density and linewidth variation in silicon photonics waveguides

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