Picometer wavefront sensing using the phase-contrast technique-Reference-Cited by-同舟云学术

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Picometer wavefront sensing using the phase-contrast technique

Published:2020-09-28 Issue:10 Volume:7 Page:1267
ISSN:2334-2536
Container-title:Optica
language:en
Short-container-title:Optica

Author:

Steeves John,Wallace J. Kent,Kettenbeil Christian,Jewell Jeffrey

Funder

Jet Propulsion Laboratory

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Metrology for the next generation of semiconductor devices

2. Extreme ultraviolet lithography: A review

3. 100-picometer interferometry for EUVL

4. Diffraction phase and fluorescence microscopy

5. Concepts for nanoscale resolution in fluorescence microscopy

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3. Gemini planet imager 2.0: implementing a Zernike wavefront sensor for non-common path aberrations measurement;Techniques and Instrumentation for Detection of Exoplanets XI;2023-10-05

4. Dual purpose lyot coronagraph masks for simultaneous high-contrast imaging and high-resolution wavefront sensing;Techniques and Instrumentation for Detection of Exoplanets XI;2023-10-05

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