Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source-Reference-Cited by-同舟云学术

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Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Published:1993-12-01 Issue:34 Volume:32 Page:6934
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Haney Steven J.,Berger Kurt W.,Kubiak Glenn D.,Rockett Paul D.,Hunter John

Publisher

The Optical Society

Reference2 articles.

1. Mass-Ablation Rates in a Spherical Laser-Produced Plasma

2. Evidence for large heat fluxes from the mass ablation rate of laser-irradiated spherical targets

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