Fabrication influences on deep-ultraviolet tungsten wire grid polarizers manufactured by double patterning-Reference-Cited by-同舟云学术

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Fabrication influences on deep-ultraviolet tungsten wire grid polarizers manufactured by double patterning

Published:2014-11-07 Issue:22 Volume:39 Page:6434
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Siefke Thomas,Lehr Dennis,Weber Thomas,Voigt Daniel,Kley Ernst-Bernhard,Tünnermann Andreas

Funder

German Ministry of Education and Science

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference13 articles.

1. Polarization effects associated with hyper-numerical-aperture $(> 1)$ lithography

2. Using the aerial image measurement technique to speed up mask development for 193-nm immersion and polarization lithography

3. The Wire Grid as a Near-Infrared Polarizer

4. Tungsten wire grid polarizer for applications in the DUV spectral range

5. Rigorous coupled-wave analysis of metallic surface-relief gratings

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1. Design of extreme ultraviolet wire grid polarizers by vacuum guiding;Applied Physics Letters;2024-06-10

2. Optical metasurfaces made by cell projection lithography;PhotonicsViews;2022-08-27

3. Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces;Nanoscale;2022

4. Fabrication influences on a miniaturised stokes polarimeter consisting of stacked nano-optical wire grid polarizer and retarders;EPJ Web of Conferences;2022

5. Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers;Optics Express;2020-07-20

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