Optimization of Ta_2O_5 optical thin film deposited by radio frequency magnetron sputtering
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Publisher
The Optical Society
Reference21 articles.
1. Influence of SiO2at the Ta2O5/Si interface on dielectric characteristics of Ta2O5capacitors
2. High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties
3. High quality r.f. sputtered metal oxides (Ta2O5, HfO2) and their properties after annealing
4. Investigation of damage threshold to TiO2 coatings at different laser wavelength and pulse duration
5. The study of optical and microstructural evolution of Ta2O5 and SiO2 thin films by plasma ion assisted deposition method
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3. Tantalum Pentoxide: From Crystal Structures to Applications in Water Splitting;Energy & Fuels;2023-08-30
4. Study on Structural and Optical Properties of Ta2O5 Nanocluster;Springer Proceedings in Materials;2023
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