Investigation of ellipsometric parameters of 2D microrough surfaces by FDTD
Author:
Funder
National Natural Science Foundation of China (NSFC)
China Postdoctoral Science Foundation
China Postdoctoral Council
Publisher
The Optical Society
Reference18 articles.
1. Improved combination of scalar diffraction theory and Rayleigh–Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces
2. Translation of Dilute Soluble Contaminants to Wafers during Spin Coating
3. Differences in SiC thermal oxidation process between crystalline surface orientations observed by in-situ spectroscopic ellipsometry
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1. Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry;Sensors;2024-02-15
2. Study on the influence of surface roughness on the diffraction efficiency of two-dimensional gratings;Optics Express;2023-08-14
3. FDTD-Based Study on Equivalent Medium Approximation Model of Surface Roughness for Thin Films Characterization Using Spectroscopic Ellipsometry;Photonics;2022-08-30
4. Extracting optical constants of solid materials with micro-rough surfaces from ellipsometry without using effective medium approximation;Optics Express;2019-06-12
5. Applicability of the effective medium approximation in the ellipsometry of randomly micro-rough solid surfaces;Optics Express;2018-06-13
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