Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films-Reference-Cited by-同舟云学术

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Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films

Published:1996-04-01 Issue:10 Volume:35 Page:1693
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Guo Shuwen,Gustafsson Göran,Hagel Olle Jonny,Arwin Hans

Publisher

The Optical Society

Reference4 articles.

1. Benzocyclobutene optical waveguides

2. Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*

3. Optical functions of silicon determined by two-channel polarization modulation ellipsometry

4. Data analysis for spectroscopic ellipsometry

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