High-quality crystallinity controlled ALD TiO_2 for waveguiding applications-Reference-Cited by-同舟云学术

High-quality crystallinity controlled ALD TiO_2 for waveguiding applications

Published:2013-10-02 Issue:20 Volume:38 Page:3980
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Alasaarela Tapani,Karvonen Lasse,Jussila Henri,Säynätjoki Antti,Mehravar Soroush,Norwood Robert A.,Peyghambarian Nasser,Kieu Khanh,Tittonen Ilkka,Lipsanen Harri

Funder

AFOSR COMAS MURI

CIAN NSF ERC

Finnish Academy

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference17 articles.

1. Atomic layer deposited titanium dioxide and its application in resonant waveguide grating

2. Submicrometer-wide amorphous and polycrystalline anatase TiO_2 waveguides for microphotonic devices

3. Development of microfabricated TiO2 channel waveguides

4. TiO2 thin films prepared by sol–gel method for waveguiding applications: Correlation between the structural and optical properties

5. Optical waveguides in TiO_2 formed by He ion implantation

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