Atomic layer deposited titanium dioxide and its application in resonant waveguide grating
Author:
Publisher
The Optical Society
Reference18 articles.
1. Titania, silicon dioxide, and tantalum pentoxide waveguides and optical resonant filters prepared with radio-frequency magnetron sputtering and annealing
2. Preparation of TiO 2 thin films by pulsed laser deposition for waveguiding applications
3. The optical waveguiding properties of TiO2–SiO2 composite films prepared by the sol–gel process
4. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
5. Low temperature atomic layer deposition of titania thin films
Cited by 50 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature;Applied Surface Science;2023-01
2. Effect of Fe doping on the microstructure, optical and dispersion energy characteristics of TiO2 thin films prepared via spray pyrolysis technique;Results in Optics;2022-08
3. Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating;Micromachines;2021-05-21
4. High-Q titanium dioxide micro-ring resonators for integrated nonlinear photonics;Optics Express;2020-12-11
5. Synthesis and characterization of Zn-incorporated TiO2 thin films: impact of crystallite size on X-ray line broadening and bandgap tuning;Applied Physics A;2019-11-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3