Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor-Reference-Cited by-同舟云学术

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Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Published:2013-05-06 Issue:14 Volume:52 Page:3279
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Herffurth Tobias,Schröder Sven,Trost Marcus,Duparré Angela,Tünnermann Andreas

Funder

Thüringer Aufbaubank (TAB)/European Regional Development Fund (ERDF/EFRE)

German Federal Ministry of Education and Research

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference38 articles.

1. Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

2. Angle-resolved scattering: an effective method for characterizing thin-film coatings

3. Instrument for close-to-process light scatter measurements of thin film coatings and substrates

4. Goniometric optical scatter instrument for out-of-plane ellipsometry measurements

5. Design Review Of A Unique Complete Angle Scatter Instrument (CASI)

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