Instrument for close-to-process light scatter measurements of thin film coatings and substrates
Author:
Publisher
The Optical Society
Reference20 articles.
1. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
2. Relation between the angular dependence of scattering and the statistical properties of optical surfaces
3. Roughness evolution and scatter losses of multilayers for 193 nm optics
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5. Design Review Of A Unique Complete Angle Scatter Instrument (CASI)
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