Dark-field digital holographic microscopy to investigate objects that are nanosized or smaller than the optical resolution
Author:
Funder
ARCHIMEDES of the Communauté Française de Belgique)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference19 articles.
1. Real-Time and Background-Free Detection of Nanoscale Particles
2. Progress in single-molecule tracking spectroscopy
3. Heterodyne holographic microscopy of gold particles
4. Phase-shifting digital holography
5. Digital holography for quantitative phase-contrast imaging
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2. Illumination spot profile correction in digital holographic microscopy for overlay metrology;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-06-05
3. Non-isoplanatic lens aberration correction in dark-field digital holographic microscopy for semiconductor metrology;Light: Advanced Manufacturing;2023
4. Image Contrast Improvement in Interference-Dark-Field Digital Holographic Microscopy;Photonics;2021-11-17
5. Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms;Optics Express;2020-11-24
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