Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference11 articles.
1. Advanced mask aligner lithography (AMALITH)
2. Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
3. Pulse compression grating fabrication by diffractive proximity photolithography
4. Resolution enhanced proximity printing by phase and amplitude modulating masks
5. Diffractive phase-shift lithography photomask operating in proximity printing mode
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