Synthesis and physicochemical characterization of silicon oxynitride thin films prepared by rf magnetron sputtering
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Publisher
The Optical Society
Reference43 articles.
1. Optical properties of silicon related insulators
2. Hydrogen bonding configurations in silicon nitride films prepared by plasma‐enhanced deposition
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5. The Variation of Physical Properties of Plasma‐Deposited Silicon Nitride and Oxynitride with Their Compositions
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