Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Wavelength considerations in soft-x-ray projection lithography
2. Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography
3. Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region
4. La/B4C small period multilayer interferential mirror for the analysis of boron
5. Multilayer X-ray mirrors based on La/B4C and La/B9C
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