Effect of Time Delay on Laser-Triggered Discharge Plasma for a Beyond EUV Source

Abstract

We demonstrate the beyond extreme ultraviolet (BEUV) emission by a laser-triggered discharge source with the laser-current delay between 0.6 µs and 3 µs. The spectra at different electron temperatures are simulated theoretically, and the spectra at different laser-current delays are measured experimentally. The theoretical and experimental results show that the lower vapor velocity at longer laser-current delay time is beneficial for increasing the steady-state time of plasma at high temperature, thereby increasing the output intensity and spectral purity of 6.76 nm. The radiation intensity of 6.76 nm (0.6% bandwidth) increases about 240% when the delay increases from 0.6 to 3 μs.