High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas-Reference-Cited by-同舟云学术

High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas

Published:2017-03 Issue:3 Volume:88 Page:033506
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Musgrave Christopher S. A.¹^ORCID,Murakami Takehiro¹,Ugomori Teruyuki²,Yoshida Kensuke²,Fujioka Shinsuke²^ORCID,Nishimura Hiroaki²,Atarashi Hironori¹,Iyoda Tomokazu¹,Nagai Keiji¹

Affiliation:

1. Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan

2. Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan

Funder

Japan Science and Technology Agency (JST)

Publisher

AIP Publishing

Subject

Instrumentation

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5. Immersion lithography; its potential performance and issues

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