Miniature Schwarzschild objective as a micro-optical component free of main aberrations: concept, design, and first realization with silicon-glass micromachining-Reference-Cited by-同舟云学术

Miniature Schwarzschild objective as a micro-optical component free of main aberrations: concept, design, and first realization with silicon-glass micromachining

Published:2016-03-30 Issue:10 Volume:55 Page:2771
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Baranski Maciej,Passilly Nicolas,Bargiel Sylwester,Froehly Luc,Gorecki Christophe

Funder

Joint Programme Inter Carnot Fraunhofer (PICF)

Agence Nationale de la Recherche (ANR)

French RENATECH network and its FEMTO-ST technological facility MIMENTO.

Publisher

The Optical Society

Reference34 articles.

1. General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask

2. 100% Fill-Factor Aspheric Microlens Arrays (AMLA) With Sub-20-nm Precision

3. Excimer laser micromachining of aspheric microlens arrays based on optimal contour mask design and laser dragging method

4. On the chromatic aberration of microlenses

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