Pseudo actinometry for the measurement of reactive species density
Author:
Funder
Ministry of Trade, Industry and Energy (MOTIE)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference27 articles.
1. Studies of atomic oxygen in O2+CF4 rf discharges by two‐photon laser‐induced fluorescence and optical emission spectroscopy
2. Atomic-nitrogen production in a radio-frequency plasma source
3. Ultrahigh frequency versus inductively coupled chlorine plasmas: Comparisons of Cl and Cl2 concentrations and electron temperatures measured by trace rare gases optical emission spectroscopy
4. Detection of atomic oxygen: Improvement of actinometry and comparison with laser spectroscopy
5. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Spectral diagnosis of in situ plasma cleaning in large-aperture optical components: reactive species characterization and prediction of cleaning;Applied Optics;2022-03-23
2. Investigating recent developments and applications of optical plasma spectroscopy: A review;Journal of Vacuum Science & Technology A;2020-03
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