Novel V-groove structures on silicon-Reference-Cited by-同舟云学术

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Novel V-groove structures on silicon

Published:1985-06-15 Issue:12 Volume:24 Page:1784
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Sriram S.,Supertzi E. P.

Publisher

The Optical Society

Reference22 articles.

1. Schottky diodes and other devices on thin silicon membranes

2. Preparation of thin windows in silicon masks for x‐ray lithography

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