Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
36 articles.
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1. Spectroscopic Windows;Experimental Innovations in Surface Science;2015
2. Etch Stop Techniques for Micromachining;Journal of The Electrochemical Society;1997-06-01
3. A new fabrication process for metallic point contacts;Microelectronic Engineering;1997-02
4. Preparation of Large-Area Si Single Crystal Windows;Experimental Innovations in Surface Science;1997
5. Selective etching of silicon in aqueous KOH;Materials Science and Engineering: B;1995-11