Abstract
We report on determining the
optical constants of Ta in the sub-extreme ultraviolet (EUV) spectral
range 5.0–24.0 nm from the angle-dependent reflectance (ADR)
measured using monochromatized synchrotron radiation. Two sputtered
samples with differing thicknesses were investigated. Complementarily
x-ray reflectance was measured at shorter wavelengths and evaluated by
Fourier transform to facilitate an unambiguous selection of a model
for the data evaluation based on an inverse solution of the Fresnel’s
equations for a layered system. Bayesian inferences coupled with a
Nested Sampling (NS) algorithm were utilized to derive the optical
constants with their corresponding uncertainties. This report further
emphasizes the applicability of an acclaimed NS algorithm on a
high-dimensional inverse problem. We explore the possibility of
addressing the correlations between the optical constants of thin
films and their structural parameters based on other established
studies.
Funder
Electronic Components and Systems for
European Leadership
European Metrology Programme for
Innovation and Research
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
1 articles.
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