Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference23 articles.
1. Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass
2. Gray-tone lithography using an optical diffuser and a contact aligner
3. Micro-optic fabrication using one-level gray-tone lithography
4. Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks
5. Prototype laser-activated bimetallic thermal resist for microfabrication
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1. Femtosecond Laser Fabrication of Noble Metal Plasma Nanostructures and Its Application-A Mini Review;Frontiers in Physics;2022-07-04
2. Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection;ACS Applied Materials & Interfaces;2017-08-18
3. The mechanisms and research progress of laser fabrication technologies beyond diffraction limit;Acta Physica Sinica;2017
4. Fabrication-resolution enhancement method based on low-energy multiple exposures;Optics Express;2015-11-02
5. Analysis of the laser oxidation kinetics process of In-In_2O_3 MTMO photomasks by laser direct writing;Optics Express;2015-10-22
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