Affiliation:
1. Advanced Research Center for Nanolithography
2. Vrije Universiteit Amsterdam
3. V.N. Karazin Kharkiv National University
Abstract
We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5–80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.
Funder
Topconsortium voor Kennis en Innovatie
Rijksdienst voor Ondernemend Nederland
European Research Council
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Subject
Atomic and Molecular Physics, and Optics