Extreme ultraviolet Talbot interference lithography
Author:
Funder
National Science Foundation (NSF)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. A photonic-plasmonic structure for enhancing light absorption in thin film solar cells
2. Theory of Fishnet Negative-Index Optical Metamaterials
3. Arrays of nanoscale magnetic dots: Fabrication by x-ray interference lithography and characterization
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