Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry-Reference-Cited by-同舟云学术

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Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry

Published:2012-03-06 Issue:8 Volume:51 Page:1095
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Lee Ju-Yi,Lu Ming-Pei,Lin Kun-Yi,Huang Szu-Han

Funder

National Science Council, Taiwan

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference21 articles.

1. Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

2. Metrological large range scanning probe microscope

3. A new capacitive sensor for displacement measurement in a surface-force apparatus

4. A heterodyne interferometer using an electro-optic modulator for measuring small displacements

5. Quasi-common-optical-path heterodyne grating interferometer for displacement measurement

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Performance Study of Array Detector for Spatial Phase Compensation in Laser Heterodyne Detection;2024

3. Performance Study of Array Detector for Spatial Phase Compensation in Laser Heterodyne Detection;2024

4. Heterodyne speckle interferometry for measurement of two-dimensional displacement;Optics Express;2020-01-03

5. Development of grating-based precise displacement measurement technology;Chinese Optics;2019

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