Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference12 articles.
1. Doppler writing and linewidth control for scanning beam interference lithography
2. Metrological large range scanning probe microscope
3. PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage
4. Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range
5. High stability multiplexed fiber interferometer and its application on absolute displacement measurement and on-line surface metrology
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