Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Molybdenum-silicon multilayer mirrors for the extreme ultraviolet
2. Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet
3. Design and performance of capping layers for extreme-ultraviolet multilayer mirrors
4. High performance EUV multilayer structures insensitive to capping layer optical parameters
5. Enhanced reflectivity and stability of Sc/Si multilayers
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