High performance EUV multilayer structures insensitive to capping layer optical parameters
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Modeling radiation-induced carbon contamination of extreme ultraviolet optics
2. Controlling contamination in Mo/Si multilayer mirrors by Si surface capping modifications
3. Oxidation resistance of Ru-capped EUV multilayers
4. Capping layers for extreme-ultraviolet multilayer interference coatings
5. Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors
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