High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique
Author:
Publisher
The Optical Society
Reference19 articles.
1. Accurate Measurement of Lens Thickness by Using White-Light Fringes
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Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting;Precision Engineering;2017-04
2. Development and Beam-Shape Analysis of an Integrated Fiber-Optic Confocal Probe for High-Precision Central Thickness Measurement of Small-Radius Lenses;Sensors;2015-04-13
3. Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer;Optics Express;2015-02-10
4. Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer;Optics and Lasers in Engineering;2013-10
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