Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference18 articles.
1. Surface profiling by analysis of white-light interferograms in the spatial frequency domain;de Groot;J Mod Opt,1995
2. Simultaneous measurement of the phase and group refractive indices and thickness of transparent plates by low-coherence interferometry;Haruna;Opt Lett,1998
3. Thin-film thickness profile and its refractive index measurement by dispersive white-light interferometry;Ghim;Opt Express,2006
4. Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics;Kim;Opt Express,2008
5. Separation of measurement of the refractive index and geometrical thickness by use of a wavelength scanning interferometer with a confocal microscope;Fukano;Appl Opt,1999
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