Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks
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Publisher
The Optical Society
Reference15 articles.
1. High-efficiency multilayer dielectric diffraction gratings
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2. Surface form metrology of micro-optics;SPIE Proceedings;2013-06-22
3. Measurement of duty cycles of metal grating masks formed on dielectric substrates;Applied Optics;2011-06-09
4. In situ monitoring for development of rectangular photoresist gratings on transparent substrates;Applied Optics;2010-01-15
5. Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images;Key Engineering Materials;2008-06
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