Abstract
Measuring grating profiles is very helpful for the analysis of specifications of gratings
and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the
scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to
extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by
the shape of grating profile, the calculated diffraction efficiency based on the SEM image and
measured diffraction efficiency based on experiment was compared and analyzed.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献